库存数量:
产品介绍:RHEED可以广泛应用于MBE(分子束外延),PLD(脉冲激光沉积)等其它需要实时监测材料生长状态的设备中。它将带有晶体表面信息的反射束呈现于接收荧光屏上,通过图像采集和解析软件,对收集到的信息进行分析,从而使用户获得薄膜厚度,组分以及晶体生长机制等重要信息。
0…30 keV electron energy
0…160 μA beam current
90 μm (max.) beam diameter
Remote control for HV, filament, focus/deflection lens
Designed for easy maintenance (filament replacement, beam alignment)
Model number: | RDA-003G |
Beam spot size: | 90 μm diameter max. |
Filament: | Ø0.1 mm Tungsten wire, hairpin-shaped |
Wehnelt: | Self-biased |
Focus lens: | Air core solenoid coil lens |
Deflection lens: | Toroidal coil lens |
Axial alignment mechanism: | Alignment for filament and Wehnelt |
Insulation voltage: | 30 kV DC |
Working pressure: | <10−4 Pa to 10−9 Pa (7.5·10−7 Torr to 7.5·10−12 Torr) |
Bakeout temperature: | max. 200°C |
Mounting flange: | ICF70 (CF DN35 / 2¾") |
Dimensions: | 100 mm Ø × 401 mm long (501 mm long with connector) |
Model number: | RDA-004P |
Acceleration voltage: | 0…−30 kV constant voltage supply, ripple 0.03% max. |
Beam current: | 0…160 μA |
Filament voltage: | 0…5 V constant voltage supply, ripple 0.05% max. |
Filament current: | 2 A max. |
Deflection lens supply: | 0…1 A constant current supply (±1 V), ripple 0.05% max. |
Focus lens supply: | 0…1.5 A constant current supply (0…22 V), ripple 0.05% max. |
Input voltage: | 200…240 V AC |
Dimensions (W×H×D): | 480×199×500 mm3 (depth +100 mm with cable connected), 19" rack mount |
Safety features: | High voltage interlock |
Others: | RoHS-ready |
For more information, contact us sales@gamtic.om,185 0219 3480.
Model number: | RDA-100G |
Beam spot size: | 90 μm diameter max. |
Filament: | Ø0.1 mm hairpin-shaped |
Wehnelt: | Variable bias |
Focus lens: | Air core solenoid coil lens |
Deflection lens: | Toroidal coil lens |
Axial alignment mechanism: | Alignment for filament and Wehnelt |
Insulation voltage: | 30 kV DC |
Allowable leakage: | <1.33·10−11 Pa·m3/s |
Bakeout temperature: | max. 200°C |
Mounting flange: | ICF70 (CF DN35 / 2¾") |
Dimensions: | 100 mm Ø × 401 mm long (501 mm long with connector) |
Model number: | RDA-100M |
Viewport size: | ICF152 (CF DN100 / 6") |
Micro channel plate: | 77 mm Ø viewable area |
Input terminal: | MHV×3 |
Mounting flange: | ICF152 (CF DN100 / 6") or ICF203 (CF DN150 / 8") |
Other: | built-in shutter on mounting flange |
Model number: | RDA-100P |
Acceleration voltage: | 0…−30 kV constant voltage supply, ripple 0.03% max. |
Filament voltage: | 0…2 V constant voltage supply, ripple 0.05% max. |
Deflection lens supply: | 0…1 A constant current supply (±1 V), ripple 0.05% max. |
Focus lens supply: | 0…1.5 A constant current supply (0…22 V), ripple 0.05% max. |
Wehnelt bias voltage: | 0…−470 V 6 mA variable |
MCP CH 1 supply: | 0…+4 kV 1 mA DC (digital display) |
MCP CH 2 supply: | 0…+1 kV 1 mA DC (digital display) |
Output cables: | 5 m each |
Input voltage: | 200…240 V AC |
Dimensions (W×H×D): | 480×199×500 mm3 (depth +100 mm with cable connected), 19" rack mount |
Others: | RoHS-ready |
For more information, contact us sales@gamtic.om,185 0219 3480.
RHEED(反射高能电子衍射仪)是观察晶体生长最重要的实时监测仪器之一。它可以通过较小的掠射角将能量为10~30KeV的单能电子掠射到晶体表面,通过衍射斑点获得薄膜厚度,组分以及晶体生长机制等重要信息。 因此反射高能电子衍射仪已成为MBE、PLD等系统中监测薄膜表面形态的一种常规手段。
R-DEC公司生产的反射高能电子衍射仪,具有界面友好可操作性高,稳定性和耐久性以及拥有高亮度的衍射斑点等特点,得到世界各研究机构的认可和推荐。
产品特征:
可远程控制调节电压,束流强度,聚焦位置以及光束偏转
XY轴±5度电子束偏转
高效荧光屏拥有高亮度衍射斑点
电子枪内表面经特殊处理,能实现极低放气率
镍铁高导磁合金磁屏蔽罩(可选)
可搭载差动排气系统用于低真空系统(可选)
负高压电源安全闭锁功能
高可靠性
kSA400分析软件(optional)
Click to enlarge