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产品介绍:Ionautics提供1KW,6KW,10KW的超快HiPIMS电源
Ionautics开发了一种新型超快HiPIMS电源,以满足未来HiPIMS工艺的需求。 1 kW HiPIMS单元,适用于磁控管尺寸达50 cm2或约3英寸的圆形靶材(4英寸以下)。
联系:sales@gamtic.com,185 0219 3480
Average Power: 1000 W
Peak Voltage: 1000 V
Peak Current: 100 A
Regulation Modes: Voltage, Current, Power, Puls current
Pulse frequency: 1-10000 Hz
Pulse Duration: 2.5 µs to 1000 µs
Arc control: reaction time < 2 µs
19" rack (3U)
135 mm (H) x 483 mm (W) x 390mm (D)
Weight: ≈ 5 kg
Input Voltage: AC 1 phase + N, 100-240 VAC, 50/60 Hz
Input Current at 230 V: 0.3 A
DC Charging Input: 1000 V max, positive grounded
Operating Temperature: +5ºC to +40ºC
Storage Temperature: -25ºC to +55ºC
Relative Humidity: max 85% non condensing
Air Pressure: 80 kPa to 106 kPa
Cooling: Air Cooling
Pollution degree: 2 (or better). Cooling air must normally be free of corrosive vapos and conductive particles
Norms: CE marked
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