Gimbal-less Two Axis (Tip-Tilt) MEMS Mirrors 万向节双轴（尖端倾斜）MEMS扫描镜
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Scanning two axis (tip-tilt) MEMS mirror (or "micromirror") is an optical beam-steering (or 2D optical scanning) technology that is used in many industries. There are several major benefits of the Mirrorcle Technologies Inc. tip-tilt MEMS mirror over competing products. Gimbal-less Two-Axis Scanning Micromirror Devices based on ARI-MEMS fabrication technology initially developed through research projects at the Adriatic Research Institute (“ARI”) in Berkeley, CA, provide ultra low-power and very fast optical beam scanning in two-axes. The devices deflect laser beams to optical scanning angles of up to 32° at high speeds in both axes. Compared to the large-scale galvanometer optical scanners, our devices require several orders of magnitude less driving power. Continuous full-speed operation of our electro-static actuators dissipates less than a few milliwatts of power.
扫描双轴（尖端倾斜）MEMS镜（或“微镜”）是用于许多行业的光束转向（或2D光学扫描）技术。 Mirrorcle Technologies Inc.尖端倾斜MEMS镜面的竞争产品有几个主要优点。 基于ARI-MEMS制造技术的无支架双轴扫描微镜器件最初通过位于加利福尼亚州伯克利的亚得里亚海研究所（“ARI”）的研究项目开发，提供超低功耗和非常快速的光束扫描，轴。 这些器件在两个轴上以高速将激光束偏转到高达32°的光学扫描角度。 与大型检流计光学扫描仪相比，我们的设备需要几个数量级的驱动功率。 我们的静电执行器的连续全速运行消耗的功率不到几毫瓦。
MirrorcleTech devices are made entirely of single-crystal silicon, resulting in excellent repeatability and reliability. Optically flat and smooth mirrors are coated with a thin film with desired reflectivity. Larger mirrors can be bonded onto actuators for custom aperture sizes. Mirror sizes from 0.8mm to 5.0mm in diameter are currently available in stock. Sizes up to 9.0mm were successfully demonstrated in special applications.
MirrorcleTech's MEMS micromirror technology is highly versatile and adaptable to various applications. Some devices are fabricated with somewhat generic quasi-static (point-to-point) performance specifications. Other devices are highly customized to achieve specific set of specifications, such as e.g. projection-displays.
MirrorcleTech设备完全由单晶硅制成，具有出色的重复性和可靠性。 光学平坦和光滑的镜子涂覆有具有所需反射率的薄膜。 更大的镜子可以粘合到执行器上，用于定制孔径尺寸。 镜头尺寸从0.8mm到5.0mm的直径目前有库存。 高达9.0mm的尺寸在特殊应用中得到了成功的证明。
MirrorcleTech的MEMS微镜技术非常通用，适用于各种应用。 某些器件采用某种通用的准静态（点对点）性能规格制造。 其他设备被高度定制以实现特定的一组规范，例如投影显示器。
The tilt angle is analog as opposed to on-off. See video of tip-tilt-piston movement under microscope.
This is the key differentiation with digital micromirror elements which can not be used for arbitrary-direction optical beam steering. In other words, if a tilt angle of 6.15° is required, it is simply a matter of applying the correct voltage and that angle (or any other angle) can be obtained and maintained for any length of time with nearly zero power consumption.
The devices are designed and optimized for point-to-point optical beam scanning mode of operation. A steady-state analog actuation voltage results in a steady-stage analog angle of rotation of the micromirror. There is a one-to-one correspondence of voltages and angles that is highly repeatable.
In order to produce devices with a different mirror size, most technologies require not only a new fabrication cycle, but in some cases complete actuator redesign. Mirrorcle Technologies is the world's only provider of a MEMS based, customizable aperture size beam steering technology. Namely, sets of electrostatic actuators optimized for speed, angle, area footprint or resonant driving are designed and realized in a self-aligned silicon fabrication process. Metallized, ultra low-inertia single crystal mirrors made stiff and flat by a special design of silicon beams are created in a separate fabrication process. The diameter, as well as geometry of the mirror is selected by customer, in order to optimize the trade-offs between speed, beam size, and scan angle for each individual application. The mirrors are subsequently bonded to the actuators.
A variety of gibmal-less two-axis actuator designs are available. The actuators lend themselves inherently to a modular design approach. Each actuator can utilize rotators of arbitrary length, arbitrarily stiff linkages, and arbitrarily positioned mechanical rotation transformers. In stock categories include 4.25mm x 4.25mm die size, 5.2mm x 5.2mm die size, 7.2mm x 7.2mm die size, and 8.0mm x 8.0mm die size. In most cases, larger die size allows better performance due to increased electrostatic force. Beyond die size other parameters are varied such as e.g. stiffness. One device series for example is designed to operate at large angles (-7.5° to +7.5° of mechanical tilt,) while another series is designed to operate at small tip-tilt angles but dramatically higher speeds (-0.8° to +0.8° of mechanical tilt).
High Speed Point-To-Point Optical Beam Scanning
The major advantage of our proprietary gimbal-less design is the capability to scan optical beams at equally high speeds in both axes. A typical device with a 0.8 mm diameter-sized micromirror achieves angular beam scanning of up to 500 rad/s and has first resonant frequency in both axes at approximately 4 kHz. Large angle step response settling times of <100 µs have been demonstrated on devices with micromirrors up to 0.8 mm in diameter. Devices with 2.0mm diameter mirrors can achieve large angle step settling times of <1ms, with first resonance of approximately 1.3 kHz.
Dynamic Mode Scanning
Devices can also operate in the dynamic, resonant mode. In this mode, low actuation voltages at frequencies near resonance result in large bi-directional optical beam angles (e.g. -16° to 16°). Resonant frequencies are in the range from several kHz up to 21 kHz and higher for MEMS display applications. Resonance depends on the actuator type (series,) and the micromirrortype and diameter that is assembled with the actuator.
Integrated Mirror Devices:
· Mirror Sizes镜面尺寸: 0.8 mm, 1.2mm, 1.6mm, 2.0mm, and 2.4mm diameter always in stock.
· Maximum tilt angle under point-to-point driving: -6° to +6° mechanical each axis, varies with design type.
· Maximum tilt angle under resonant driving: -7° to +7° mechanical
· Contact us for more info
Bonded Mirror Devices:
· Bonded Mirror Sizes: 2.0, 2.4, 3.0, 3.6, 4.2, and 5.0mm diameter in stock, larger possible in special orders.
· Maximum tilt angle under point-to-point driving: -6° to +6° mechanical on each axis, varies with design type.
· Maximum tilt angle under resonant driving: -7° to +7° mechanical, varies with design type.
· Contact us for more info
Typical Specifications for All Devices:
Surface Roughness: <10 nm rms
Driving Methodology: Electrostatic drive, using Mirrorcle's Bias-differential Quad-Channel MEMS drivers
Mirror Radius of Curvature: >5 m
Mirror Coating: Aluminum or Gold
Positional repeatability: better than 0.0005° (500 micro-degrees) at room temperature
Operating Temperature: -40°C to 105°C
Optical Window: Anti-reflection coated fused silica windows. Removable. Contact us for coating choices.
Optical power handling: up to 2W any mirror, any wavelength. Above 2W depends on mirror size, coating, and wavelength. E.g. 3W CW blue or green on a 2mm or larger mirror .
First resonant rotation frequency: >3 kHz for both axes for small mirror sizes, >1.2kHz for 2.0mm size, etc.
MirrorcleTech devices are highly customizable with several controllable trade-offs (mirror size vs. speed, angle vs. speed, die size vs. speed, die size vs. cost, etc.) Custom designs and fabrication is performed for larger orders or under NRE contracts.
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Please contact us for additional product details, custom device specifications, and large-quanity quotations.