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产品介绍：VarioS®-Microscanner配置器可用于根据VarioS®-Microscanner构建套件轻松地配置微型显示器，具有来自定义设计空间的各种属性。
Fraunhofer IPMS Scanner-Configurator !
The VarioS®-Microscanner-configurator may be used to easily configure microscanner-demonstrators, with individual properties from a defined design space, based on the VarioS®-Microscanner construction-kit. According to verified results, demonstrators may be chosen from over 150 fabricated designs or be fabricated with a modular or semicustomized fabrication option. Finally a quotation for a chosen design can be requested from Fraunhofer IPMS.
Introduction to Fraunhofer IPMS VarioS®-Microscanners
Fraunhofer IPMS, as a German public research institute, has a long and successful track record of developing and fabricating highly miniaturized, resonantly operated MEMS-Scanners. These so-called microscanners feature large deflection angles and low power consumption. 1D and 2D scanning devices are built from single crystalline silicon with a qualified, fully CMOS compatible bulk micromachining process. ... >>
Fraunhofer IPMS microscanners are suitable for a broad range of applications, are very reliable, robust, and even withstand accelerations of more then 2500 g. With more then 150 fabricated designs Fraunhofer IPMS possesses extensive experience in fabricating microscanners.
Fraunhofer IPMS is dedicated to transferring knowledge from research and development to industrial and consumer applications. Fraunhofer IPMS enables its customers to enter the market on time.Typical entrance barriers for microscanner-based applications as high cost and long lead times to obtain a demonstrator can be omitted by using the VarioS®-System.
LDC-Module
The LDC (laser deflection cube) is a supplement for VarioS®-Microscanners that consists of a complete dust-proof chip-housing with an anti-reflective glass dome as optical interface, backside optical position detection, an electronic driving board and a software user interface. After an order, Fraunhofer IPMS can ship the LDC-module within 10 weeks time.
Additional Fraunhofer IPMS Services
Fraunhofer IPMS offers various scientific, engineering and technological services from the field of optics, microtechnology and system design. For additional information on our MOEMS and microscanner capabilities please consult the Fraunhofer IPMS website or contact members of our scientific staff using the customer service email form.
According to the Fraunhofer IPMS product classification a demonstrator (or A-Sample) is characterized by one or all of the following items:
| Demonstrator / A-Sample | |
|---|---|
| Customer Usage | The application is for the investigation of functionality. |
| Development Status |
|
Demonstrator-Types
The Fraunhofer IPMS VarioS®-Microscanner-configurator can be used to parameterize the following types of demonstrators:
1D-Microscanner
2D-Microscanner
Customers interested in receiving VarioS®-Microscanner-demonstrators are asked to send a request for quotation. For this the VarioS®-Microscanner configurator's built-in email form can be used. Alternatively an email can be sent via the customer service email form. Price information for our demonstrators is foundhere.
Technical Properties
| Mirror Motion | harmonic oscillation |
|---|---|
| Scan Frequencies | depending on configuration type and design parameters 100 Hz - 50 kHz |
| Drive Signal | A square wave voltage input signal is required which can be generated with standard laboratory equipment - a power supply unit is not in the standard scope of delivery with VarioS®-Microscanner-demonstrators. 1D- VarioS®-Microscanner-demonstrators can be delivered with the Laser Deflection Cube as an option. Alternatively customer-specific drive electronics and system designs can be delivered as result of a research and development project from Fraunhofer IPMS. |
| Amplitude | up to ±29° maximum mechanical deflection, amplitude controllable via electrode voltage and input pulse frequency |
| Drive Mode | electrostatic-resonant |
|---|---|
| Drive | planar comb electrodes with out-of-plane motion |
| 2D Axis Configuration | gimballed |
| Position Sensors | no position sensor integrated |
| Mirror Shape | circular |
| Mirror Diameter / 1D-Microscanner | 0.5 - 3 mm |
| Mirror Diameter / 2D-Microscanner | 0.5 - 2 mm |
| Mirror Reflectance | dependent on wavelength of light source, approx. 80-92% (see Fig. 1) for visible range |
| Chip Dimensions | 5370 µm x 4540 µm |
Fig 1: Typical reflectance curve of aluminum mirror coating in relation to wavelength of light source
Technology
| Substrate | Bonded Silicon on Insulator (BSOI), stack:
| |
|---|---|---|
| Fabrication Process | bulk silicon MOEMS process (AME75). Fabrication is performed at the facilities of Fraunhofer IPMS. | |
| Materials |
| |
| Chip Housing/Protection | DIL14 with visible range broadband ARC glass cover(see Fig.2). |  |
| Option available: LDC-Module with glass dome (1D laser deflection cube, sealed housing, sensor and electronics) or DIL20 housing with NIR ARC glass cover (see Fig.3) | ||
Fig 2: Transmission of the broadband ARC glass cover at normal incidence angle
Fig 3: Transmission of the NIR ARC glass cover at normal incidence angle
Additional Properties
| Parametric Mirror Excitation | Operation principle is based on parametric resonance. Therefore the system will start spontaneous oscillation within a specific range of drive voltage and repetition rate. |
|---|---|
| Static Deformation | mirror plate radius of curvature typically > 5 m |
| Dynamic Deformation | Mirror mass inertia leads to dynamic deformation of the mirror plate. Mirror dynamic deformation scales linearly with mirror deflection (see Fig.4). Mirror dynamic deformation typically is characterized by the root mean square (RMS) of the deflection field in respect to the ideal plane mirror plate. |
Fig 4: Cross sectional scheme of deformed mirror plate. - During operation inertia forces cause the mirror plate to bend. The bending of the mirror plate is described by a local deflection δ0 with respect to the undeformed mirror plate. To provide a measure of the mirror's dynamic deformation the root mean square (RMS) of the deflection field is calculated.
Scope of Delivery for VarioS®-Microscanner-Demonstrators
1D/2D -microscanner-demonstrators
a) - mounted to DIL14 carrier with broadband ARC glass sealing or as an option for 1D-microscanners
b) - integrated into a LDC-Module
characterization report